Application of capacitor microphones and magnetic pickups to the tuning and trouble shooting of microelectronic ultrasonic bonding equipment / George G. Harman and Herbert K. Kessler.

Author/creator Harman, George G.
Other author Kessler, Herbert K., author.
Other author United States. National Bureau of Standards.
Format Book
Publication[Washington, D.C.] : National Bureau of Standards, 1971.
Descriptionii, 22 pages : illustrations ; 26 cm
Subjects

SeriesNBS technical note ; 573
NBS technical note ; 573. ^A4336
Contents Introduction -- Capacitor microphone -- Procedure for reestablishing vibration amplitude, tuning, and diagnosing troubles in ultrasonic wire bonding machines, using a capacitor microphone -- Magnetic pickups for tuning and establishing vibration amplitude of ultrasonic wire bonding equipment -- Appendix. Interferometer calibration of bonding tool tip motion.
Abstract Microelectronic ultrasonic wire bonding equipment typically welds wires to integrated circuits at frequencies between 50 and 65 kHz. Mechanical vibrations at these frequencies are difficult to measure directly and malfunctions of the system may not be recognized. Two different methods of measuring these vibrations are described. The first method involves use of a capacitor microphone and a tapered tip, and the second method use of a small magnetic pickup. Procedures are given for establishing a specific ultrasonic vibration amplitude, tuning the ultrasonic system to resonance, and diagnosing both mechanical and electrical problems in wire bonding equipment. Although these techniques and procedures were developed for ultrasonic wire bonding equipment, they are applicable to other ultrasonic welding systems of lead attachment, such as flip-chip, beam lead and spider bonding.
General noteIssued May 1971.
General noteGPO Historic Shelflist Project- publication not in hand.
General noteGPO Cataloging Record Distribution Program (CRDP).
Bibliography noteIncludes bibliographical references (page 21).
GPO item number0249-A
Govt. docs number C 13.46:573