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003 OCoLC;

005 20141211184655.0;

008 050601s2005 ne a b 001 0 eng ;

010 a| 2005015829;

020 a| 1402032382;

029 1 a| OHXb| har055013659;

035 a| (Sirsi) o60550497;

035 a| (OCoLC)60550497;

042 a| pcc;

049 a| EREE;

050 00 a| QC688b| .P74 2005;

082 00 a| 537.52| 22;

100 1 a| Santos, Héctor J. de los.=| ^A613237;

245 10 a| Principles and applications of NanoMEMS physics /c| by Héctor J. De Los Santos.;

300 a| xv, 254 pages :b| illustrations ;c| 25 cm.;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

490 1 a| Microsystems ;v| 15;

504 a| Includes bibliographical references (p. [241]-252) and index.;

505 0 a| Nanoelectromechanical systems -- NanoMEMS physics: quantum wave-particle phenomena -- NanoMEMS physics: quantum wave phenomena -- NanoMEMS applications: circuits and systems -- NanoMEMS applications: photonics.;

650 0 a| Quantum electronics.=| ^A36178;

650 0 a| Wave-particle duality.=| ^A217556;

650 0 a| Nanotechnology.=| ^A361898;

650 0 a| Microelectromechanical systems.=| ^A424252;

830 0 a| Microsystems (Series) ;v| v. 15.=| ^A413142;

856 41 3| Table of contentsu| http://www.loc.gov/catdir/toc/ecip0513/2005015829.html;

994 a| 92b| ERE;

910 a| PromptCat;

938 a| Baker & Taylorb| BKTYc| 119.00d| 119.00i| 1402032382n| 0006440030s| active;

938 a| Otto Harrassowitzb| HARRn| har055013659c| 95.23 EUR;

980 a| 2006-02-01b| 119d| 0e| 99.96f| 756996;

596 a| 1;

998 a| 1024285;

999 a| QC688 .P74 2005w| LCc| 1i| 30372012955222d| 4/28/2006l| JGESm| JOYNERp| $99.96r| Ys| Yt| JGESBKu| 2/8/2006x| BOOKz| JSTACKSo| .STAFF. 0;

Principles and applications of NanoMEMS physics / by Héctor J. De Los Santos.

Author/creator	Santos, Héctor J. de los
Format	Book
Publication Info	Dordrecht, The Netherlands : Springer, ©2005.
Description	xv, 254 pages : illustrations ; 25 cm.
Supplemental Content	Table of contents
Subjects	Quantum electronics. Wave-particle duality. Nanotechnology. Microelectromechanical systems.

Series	Microsystems ; 15 Microsystems (Series) ; v. 15. ^A413142
Contents	Nanoelectromechanical systems -- NanoMEMS physics: quantum wave-particle phenomena -- NanoMEMS physics: quantum wave phenomena -- NanoMEMS applications: circuits and systems -- NanoMEMS applications: photonics.
Bibliography note	Includes bibliographical references (p. [241]-252) and index.
LCCN	2005015829
ISBN	1402032382

Principles and applications of NanoMEMS physics / by Héctor J. De Los Santos.

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