Focused ion beam systems : basics and applications / edited by Nan Yao.
| Other author | Yao, Nan. |
| Format | Book |
| Publication Info | Cambridge : Cambridge University Press, 2007. |
| Description | xi, 395 pages : illustrations ; 26 cm |
| Subjects |
| Bibliography note | Includes bibliographical references and index. |
| ISBN | 9780521831994 (hbk.) |
| ISBN | 0521831997 (hbk.) |