Focused ion beam systems : basics and applications / edited by Nan Yao.

Other author Yao, Nan.
Format Book
Publication InfoCambridge : Cambridge University Press, 2007.
Descriptionxi, 395 pages : illustrations ; 26 cm
Subjects

Bibliography noteIncludes bibliographical references and index.
ISBN9780521831994 (hbk.)
ISBN0521831997 (hbk.)