Optimization of PbTiO₃ seed layers for PZT MEMS actuators / Luz Sanchez and Ronald G. Polcawich.
| Author/creator | Sanchez, Luz |
| Other author | Polcawich, Ronald G. |
| Other author | U.S. Army Research Laboratory. |
| Format | Electronic |
| Publication Info | Adelphi, MD : Army Research Laboratory, [2008] |
| Description | vi, 22 pages : digital, PDF file. |
| Supplemental Content | https://purl.fdlp.gov/GPO/LPS109119 |
| Subjects |
| Series | ARL-TR ; 4697 ARL-TR (Aberdeen Proving Ground, Md.) ; 4697. ^A566074 |
| General note | Title from title screen (viewed Feb. 19, 2009). |
| General note | "December 2008." |
| Bibliography note | Includes bibliographical references (p. 20). |
| Report note | Summary; May to September 2008. |
| Technical details | Mode of access: Internet from ARL web site. Address as of 2/19/2009: http://www.arl.army.mil/arlreports/2008/ARL-TR-4697.pdf ; current access via PURL. |
| Technical rpt# | ARL-TR-4697 |
| GPO item number | 0324-A-01 (online) |
| Govt. docs number | D 101.133:4697 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |