Thermal characterization of thin films for MEMS applications / by David J. Howe and Brian Morgan.
| Author/creator | Howe, David J. |
| Other author | Morgan, Brian. |
| Other author | U.S. Army Research Laboratory. |
| Format | Electronic |
| Publication Info | Adelphi, Md. : Army Research Laboratory, [2008] |
| Description | iv, 14 pages : digital, PDF file. |
| Supplemental Content | https://purl.fdlp.gov/GPO/LPS113054 |
| Subjects |
| Variant title | Thermal characterization of thin films for microelectromechanical systems applications |
| Series | ARL-TR ; 4378 ARL-TR (Aberdeen Proving Ground, Md.) ; 4378. ^A566074 |
| General note | Title from title screen (viewed on May 26, 2009). |
| General note | "February 2008." |
| Technical details | Mode of access: Internet from the ARL web site. Address as of 5/26/09: http://www.arl.army.mil/arlreports/2008/ARL-TR-4378.pdf ; current access is available via PURL. |
| GPO item number | 0324-A-01 (online) |
| Govt. docs number | D 101.133:4378 |