A piezoelectric MEMS microphone based on lead zirconate titanate (PZT) thin films / Ronald G. Polcawich.

Author/creator Polcawich, Ronald G.
Other author U.S. Army Research Laboratory.
Format Electronic
Publication InfoAdelphi, MD : Army Research Laboratory, [2004]
Description1 online resource (vi, 20 pages) : illustrations (some color), charts (some color).
Supplemental Contenthttps://purl.fdlp.gov/GPO/LPS125007
Subjects

SeriesARL-TR ; 3387
ARL-TR (Aberdeen Proving Ground, Md.) ; 3387. ^A566074
General noteTitle from PDF title screen (viewed on Aug. 10, 2010).
General note"November 2004."
Bibliography noteIncludes bibliographical references (p. 17-18).
Report noteFinal report Dec. 2002-July 2004.
GPO item number0324-A-01 (online)
Govt. docs number D 101.133:3387

Availability

Library Location Call Number Status Item Actions
Electronic Resources Access Content Online ✔ Available