Semiconductor microelectronics and nanoelectronics programs.

Other author National Institute of Standards and Technology (U.S.)
Format Electronic
Publication Info[Gaithersburg, Md.] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2006]
Description1 online resource (vii, 226 pages) : illustrations (chiefly color).
Supplemental Contenthttp://purl.fdlp.gov/GPO/gpo6320
Subjects

SeriesNISTIR ; 7321
NISTIR ; 7321. ^A682451
General noteTitle from title screen (viewed on April 18, 2011).
General note"July 2006."
Bibliography noteIncludes bibliographical references.
GPO item number0247-D
Govt. docs number C 13.58:7321

Availability

Library Location Call Number Status Item Actions
Electronic Resources Access Content Online ✔ Available