Tools

LEADER 01692cam 2200421La 4500

001 ocm10473879;

005 20141212070912.0;

008 820709m19819999wb a b 001 0 eng ;

010 a| 81004313;

020 a| 0387105212 (U.S.);

020 a| 3540105212 (Berlin);

035 a| (Sirsi) o10473879;

035 a| (OCoLC)7306737;

040 a| DLCc| RBNd| EREd| UtOrBLW;

049 a| EREEa| EREE;

050 00 a| QC176.8.S72b| S68;

082 0 a| 530.4/12| 19;

245 00 a| Sputtering by particle bombardment /c| edited by R. Behrisch ; with contributions by H.H. Andersen [and others].;

260 a| Berlin ;a| New York :b| Springer-Verlag,c| 1981-;

300 a| volumes :b| illustrations ;c| 24 cm.;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

490 1 a| Topics in applied physics ;v| v. 47, 52;

504 a| Includes bibliographical references and indexes.;

505 0 a| 1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography. .;

650 0 a| Sputtering (Physics)=| ^A86238;

650 0 a| Solidsx| Effect of radiation on.=| ^A16727;

650 0 a| Surfaces (Physics)x| Effect of radiation on.=| ^A107830;

700 1 a| Behrisch, Rainer.=| ^A184420;

700 1 a| Andersen, Hans Henrik.=| ^A90754;

740 0 a| Particle bombardment.;

830 0 a| Topics in applied physicsv| v. 47.=| ^A68364;

830 0 a| Topics in applied physicsv| v. 52.=| ^A68364;

919 a| BOOK;

596 a| 1;

998 a| 253646;

999 a| QC176.8.S72 S68w| LCc| 1i| 30372003099014e| 2/8/1992l| JGESm| JOYNERr| Ys| Yt| JGESBKu| 2/16/1989x| BOOKz| JSTACKSo| .STAFF. 0o| .STAFF. Copy Statement : c.1;

Sputtering by particle bombardment / edited by R. Behrisch ; with contributions by H.H. Andersen [and others].

Other author	Behrisch, Rainer.
Other author	Andersen, Hans Henrik.
Format	Book
Publication Info	Berlin ; New York : Springer-Verlag, 1981-
Description	volumes : illustrations ; 24 cm.
Subjects	Sputtering (Physics) Solids--Effect of radiation on. Surfaces (Physics)--Effect of radiation on.

Series	Topics in applied physics ; v. 47, 52 Topics in applied physics v. 47. ^A68364 Topics in applied physics v. 52. ^A68364
Contents	1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography. .
Bibliography note	Includes bibliographical references and indexes.
Other title	Particle bombardment.
LCCN	81004313
ISBN	0387105212 (U.S.)
ISBN	3540105212 (Berlin)

Availability

Library	Location	Call Number	Status	Item Actions
Joyner	General Stacks	QC176.8.S72 S68	✔ Available	Place Hold

Sputtering by particle bombardment / edited by R. Behrisch ; with contributions by H.H. Andersen [and others].

Click here for more information about this title

Availability