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001 ocm10710535;

005 20141212071340.0;

008 840319s1984 wb a b 001 0 eng ;

010 a| 84005394;

020 a| 0387133208 (U.S.);

035 a| (Sirsi) o10710535;

035 a| (OCoLC)10710535;

040 a| DLCc| DLCd| EREd| UtOrBLW;

049 a| EREEa| EREE;

050 00 a| QC176.84.S93b| T46 1984;

082 0 a| 530.4/12| 19;

245 00 a| Thin film and depth profile analysis /c| edited by H. Oechsner ; with contributions by H.-W. Etzkorn [and others].;

260 a| Berlin ;a| New York :b| Springer-Verlag,c| 1984.;

263 a| 8408;

300 a| xi, 205 pages :b| illustrations ;c| 25 cm.;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

490 1 a| Topics in current physics ;v| 37;

504 a| Includes bibliographical references and index.;

650 0 a| Thin filmsx| Surfaces.=| ^A26073;

650 0 a| Surface chemistry.=| ^A4243;

650 0 a| Sputtering (Physics)=| ^A86238;

700 1 a| Oechsner, H.q| (Hans),d| 1934-=| ^A185892;

700 1 a| Etzkorn, H. W.=| ^A185893;

830 0 a| Topics in current physics ;v| 37.=| ^A88629;

919 a| BOOK;

596 a| 1;

998 a| 255440;

999 a| QC176.84.S93 T46 1984w| LCc| 1i| 30372003688519e| 3/25/1992l| JGESm| JOYNERq| 1r| Ys| Yt| JGESBKu| 2/16/1989x| BOOKz| JSTACKSo| .STAFF. 0o| .STAFF. Copy Statement : c.1;

Thin film and depth profile analysis / edited by H. Oechsner ; with contributions by H.-W. Etzkorn [and others].

Other author	Oechsner, H. (Hans), 1934-
Other author	Etzkorn, H. W.
Format	Book
Publication Info	Berlin ; New York : Springer-Verlag, 1984.
Description	xi, 205 pages : illustrations ; 25 cm.
Subjects	Thin films--Surfaces. Surface chemistry. Sputtering (Physics)

Series	Topics in current physics ; 37 Topics in current physics ; 37. ^A88629
Bibliography note	Includes bibliographical references and index.
LCCN	84005394
ISBN	0387133208 (U.S.)

Thin film and depth profile analysis / edited by H. Oechsner ; with contributions by H.-W. Etzkorn [and others].

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