Transmission electron microscopy (TEM) sample preparation of Si[subscript 1-x]Ge[subscript x] in c-plane sapphire substrate / Hyun Jung Kim ... [et al.].

Other author Kim, Hyŏn-jŏng.
Other author Langley Research Center.
Format Electronic
Publication InfoHampton, Va. : National Aeronautics and Space Administration, Langley Research Center, [2012]
Description1 online resource (ix, 29 p.) : ill. (some col.)
Supplemental Contenthttps://purl.fdlp.gov/GPO/gpo30968

Variant title Transmission electron microscopy (TEM) sample preparation of Si1-xGex in c-plane sapphire substrate
SeriesNASA/TM ; 2012-217597
NASA technical memorandum 2012-217597. ^A467613
General noteTitle from title screen (viewed on Nov. 7, 2012).
General note"August 2012."
General noteGPO Cataloging Record Distribution Program (CRDP).
Bibliography noteIncludes bibliographical references (p. 29).
Funding informationSponsored by National Aeronautics and Space Administration 392259.02.07.9923.11
Funding informationL-20166
GPO item number0830-D (online)
Govt. docs number NAS 1.15:2012-217597