Transmission electron microscopy (TEM) sample preparation of Si[subscript 1-x]Ge[subscript x] in c-plane sapphire substrate / Hyun Jung Kim ... [et al.].
| Other author | Kim, Hyŏn-jŏng. |
| Other author | Langley Research Center. |
| Format | Electronic |
| Publication Info | Hampton, Va. : National Aeronautics and Space Administration, Langley Research Center, [2012] |
| Description | 1 online resource (ix, 29 p.) : ill. (some col.) |
| Supplemental Content | https://purl.fdlp.gov/GPO/gpo30968 |
| Variant title | Transmission electron microscopy (TEM) sample preparation of Si1-xGex in c-plane sapphire substrate |
| Series | NASA/TM ; 2012-217597 NASA technical memorandum 2012-217597. ^A467613 |
| General note | Title from title screen (viewed on Nov. 7, 2012). |
| General note | "August 2012." |
| General note | GPO Cataloging Record Distribution Program (CRDP). |
| Bibliography note | Includes bibliographical references (p. 29). |
| Funding information | Sponsored by National Aeronautics and Space Administration 392259.02.07.9923.11 |
| Funding information | L-20166 |
| GPO item number | 0830-D (online) |
| Govt. docs number | NAS 1.15:2012-217597 |