Hermetic encapsulation of nanoenergetic porous silicon wafer by parylene / Eugene Zakar [and five others].

Author/creator Zakar, Eugene author.
Other author U.S. Army Research Laboratory, issuing body.
Format Electronic
PublicationAdelphi, MD : Army Research Laboratory, August 2014.
Description1 online resource (iv, 12 pages) : color illustrations.
Supplemental Contenthttps://purl.fdlp.gov/GPO/gpo61230
Subjects

SeriesARL-TR ; 7025
ARL-TR (Aberdeen Proving Ground, Md.) ; 7025. ^A566074
General noteTitle from title screen (viewed Sept. 29, 2015).
General note"August 2014."
Bibliography noteIncludes bibliographical references (page 11).
Report noteFinal.
Funding informationARL-TR-7025
GPO item number0324-A-01 (online)
Govt. docs number D 101.133:7025