Non-destructive damping measurement for wafer-level packaged microelectromechanical system (MEMS) acceleration switches / Ryan Knight and Evan Cheng.
| Author/creator | Knight, Ryan author. |
| Other author | Cheng, Evan, author. |
| Other author | U.S. Army Research Laboratory, issuing body. |
| Format | Electronic |
| Publication | Adelphi, MD : Army Research Laboratory, September 2014. |
| Description | 1 online resource (v, 29 pages) : color illustrations. |
| Supplemental Content | https://purl.fdlp.gov/GPO/gpo61207 |
| Subjects |
| Series | ARL-TR ; 7094 ARL-TR (Aberdeen Proving Ground, Md.) ; 7094. ^A566074 |
| General note | Title from title screen (viewed Sept. 29, 2015). |
| General note | "September 2014." |
| Bibliography note | Includes bibliographical references (page 26). |
| Report note | Final. |
| Funding information | ARL-TR-7094 |
| GPO item number | 0324-A-01 (online) |
| Govt. docs number | D 101.133:7094 |