Tools

LEADER 02740cam 22005054a 4500

001 ssj0000393519;

003 WaSeSS;

005 20240612185429.0;

006 m d ;

007 cr n ;

008 070319s2007 njua sb 100 0 eng d;

010 a| 2007925112;

020 a| 1424412277 (softbound edition);

035 a| (WaSeSS)ssj0000393519;

040 a| DLCc| DLCd| DLCd| WaSeSS;

049 a| EREEa| NEHH;

050 00 a| TK7871.85b| .I2226 2007;

082 00 a| 621.3815/22| 22;

111 2 a| IEEE International Conference on Advanced Thermal Processing of Semiconductorsn| (15th :d| 2007 :c| Catania, Italy)?| UNAUTHORIZED;

245 10 a| 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007h| [electronic resource] :b| October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy /c| IEEE Electron Devices Society.;

246 30 a| RTP 2007;

260 a| Piscataway, NJ :b| IEEE,;

300 a| 326 p. :b| ill. ;c| 28 cm.;

500 a| "IEEE Catalog Number: 07EX1783"--T.p. verso.;

504 a| Includes bibliographical references.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Semiconductorsx| Heat treatmentv| Congresses.=| ^A1156410;

650 0 a| Rapid thermal processingv| Congresses.?| UNAUTHORIZED;

650 0 a| Semiconductor dopingv| Congresses.=| ^A1242416;

650 0 a| Semiconductorsx| Defectsv| Congresses.=| ^A654219;

655 0 a| Electronic books.=| ^A491897;

710 2 a| IEEE Electron Devices Society.=| ^A85580;

710 2 a| IEEE Xplore (Online service)=| ^A534875;

856 40 z| Full text available from IEEE Electronic Library (IEL)u| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fieeexplore.ieee.org%2Fservlet%2Fopac%3Fpunumber%3D4383794;

856 40 z| Full text available from IEEE Conference Proceedings Archive 2005-2009u| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fieeexplore.ieee.org%2Fservlet%2Fopac%3Fpunumber%3D4383794;

856 40 z| Full text available from IEEE Electronic Library (IEL) Conference Proceedingsu| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fieeexplore.ieee.org%2Fservlet%2Fopac%3Fpunumber%3D4383794;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 3948268;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 3948268-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 1/1/2016x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 3948268-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 1/1/2016x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 3948268-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 1/1/2016x| EBOOKz| JERESOURCE;

15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / IEEE Electron Devices Society.

Author/creator	IEEE International Conference on Advanced Thermal Processing of Semiconductors
Other author	IEEE Electron Devices Society.
Other author	IEEE Xplore (Online service)
Format	Electronic
Publication Info	Piscataway, NJ : IEEE,
Description	326 p. : ill. ; 28 cm.
Supplemental Content	Full text available from IEEE Electronic Library (IEL)
Supplemental Content	Full text available from IEEE Conference Proceedings Archive 2005-2009
Supplemental Content	Full text available from IEEE Electronic Library (IEL) Conference Proceedings
Subjects	Semiconductors--Heat treatment. --Congresses. Rapid thermal processing--Congresses. Semiconductor doping--Congresses. Semiconductors--Defects. --Congresses.

Portion of title	RTP 2007
General note	"IEEE Catalog Number: 07EX1783"--T.p. verso.
Bibliography note	Includes bibliographical references.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2007925112
ISBN	1424412277 (softbound edition)

15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / IEEE Electron Devices Society.

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