1999 4th International Workshop on Statistical Metrology / technical co-sponsored by IEEE Electron Devices Society ; co-sponsored by VLSI symposium, The Japan Society of Applied Physics, IEEE ED Tokyo Chapter ; in cooperation with the Institute of Electronics, Information and Communication Engineers.

Author/creator International Workshop on Statistical Metrology
Other author IEEE Electron Devices Society.
Other author IEEE Xplore (Online service)
Format Electronic
Publication InfoPiscataway, NJ, USA : Purchased from: IEEE Service Center Single Publication Sales Unit,
Descriptionvi, 65 p. : ill. ; 30 cm.
Supplemental ContentFull text available from IEEE Electronic Library (IEL) Conference Proceedings
Supplemental ContentFull text available from IEEE Electronic Library (IEL)
Supplemental ContentFull text available from IEEE Conference Proceedings Archive
Subjects
Semiconductors--Characterization. --Statistical methods. --Congresses.
Semiconductors--Measurement. --Congresses.

Portion of title 4th International Workshop on Statistical Metrology
General note"IWSM."
General note"IEEE cat. no. 99TH8391."
Bibliography noteIncludes bibliographical references.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 98088036
ISBN0780351541 (softbound edition)
ISBN078035155X (microfiche edition)