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Atomic layer deposition principles, characteristics, and nanotechnology applications / Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman.
| Author/creator | Kääriäinen, Tommi |
| Other author | Cameron, David, 1949- |
| Other author | Kääriäinen, Marja-Leena. |
| Other author | Sherman, Arthur, 1931- |
| Format | Electronic |
| Edition | 2nd Edition. |
| Publication Info | Salem, Massachusetts : Scrivener Publishing, LLC ; Hoboken, New Jersey : Wiley, [2013] |
| Description | 1 online resource. |
| Supplemental Content | Full text available from Ebook Central - Academic Complete |
| Subjects |
| Bibliography note | Includes bibliographical references and index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Source of description | Description based on print version record and CIP data provided by publisher. |
| Issued in other form | Print version: Kääriäinen, Tommi. Atomic layer deposition Hoboken, New Jersey : John Wiley & Sons, [2013] 9781118062777 |
| Genre/form | Electronic books. |
| LCCN | 2013016681 |
| ISBN | 9781118747384 (epub) |
| ISBN | 9781118747421 (pdf) |
| ISBN | 9781118747346 ( mobi) |