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020 a| 1563967537 (set);

020 a| 1563968681 (CD-ROM);

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040 a| CU-Ic| CU-Id| DLCd| WaSeSS;

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050 04 a| TK7874.76b| .C49 1998;

082 00 a| 621.39/52| 21;

245 00 a| Characterization and metrology for ULSI technologyh| [electronic resource] :b| 1998 international conference, Gaithersburg, Maryland, March 1998 /c| editors, David G. Seiler ... [et al.].;

260 a| Woodbury, NY :b| American Institute of Physics,;

300 a| xv, 960 p. :b| ill. ;c| 28 cm. +e| 1 computer optical disk;

490 1 a| AIP conference proceedings,x| 0094-243x ;v| 449;

500 a| "The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998"--Pref.;

500 a| Accompanying computer disc contains full text from the book.;

504 a| Includes bibliographical references and indexes.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Integrated circuitsx| Ultra large scale integrationv| Congresses.=| ^A906457;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Seiler, David G.=| ^A434234;

711 2 a| International Conference on Characterization and Metrology for ULSI Technologyd| (1998 :c| Gaithersburg, Md.)?| UNAUTHORIZED;

830 0 a| AIP conference proceedings ;v| no. 449.=| ^A24766;

856 40 z| Full text available from AIP Conference Proceedingsu| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fpubs.aip.org%2Faip%2Facp%2Fissue%2F449%2F1;

947 a| (OCoLC)40618877;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 4009643;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4009643-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 1/1/2016x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4009643-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 1/1/2016x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4009643-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 1/1/2016x| EBOOKz| JERESOURCE;

Characterization and metrology for ULSI technology 1998 international conference, Gaithersburg, Maryland, March 1998 / editors, David G. Seiler ... [et al.].

Other author	Seiler, David G.
Other author	International Conference on Characterization and Metrology for ULSI Technology (1998 : Gaithersburg, Md.)
Format	Electronic
Publication Info	Woodbury, NY : American Institute of Physics,
Description	xv, 960 p. : ill. ; 28 cm. + 1 computer optical disk
Supplemental Content	Full text available from AIP Conference Proceedings
Subjects	Integrated circuits--Ultra large scale integration. --Congresses. Integrated circuits--Ultra large scale integration. --Congresses. --Software.

Series	AIP conference proceedings, 0094-243x ; 449 AIP conference proceedings ; no. 449. ^A24766
General note	"The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998"--Pref.
General note	Accompanying computer disc contains full text from the book.
Bibliography note	Includes bibliographical references and indexes.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	98087959
ISBN	1563967537 (set)
ISBN	1563968681 (CD-ROM)

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Characterization and metrology for ULSI technology 1998 international conference, Gaithersburg, Maryland, March 1998 / editors, David G. Seiler ... [et al.].

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