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111 2 a| International Conference on Characterization and Metrology for ULSI Technologyd| (2003 :c| Austin, Tex.)?| UNAUTHORIZED;

245 10 a| Characterization and metrology for ULSI technologyh| [electronic resource] :b| 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March, 2003 /c| editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards and Technology ... [et al.].;

260 a| Melville, N.Y. :b| American Institute of Physics,;

300 a| xviii, 818 p. :b| ill. ;c| 28 cm. +e| 1 CD-ROM (4 3/4 in.);

490 1 a| AIP conference proceedings,x| 0094-243X ;v| v. 683;

504 a| Includes bibliographical references and index.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Integrated circuitsx| Ultra large scale integrationv| Congresses.=| ^A906457;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Seiler, David G.=| ^A434234;

710 2 a| National Institute of Standards and Technology (U.S.)=| ^A259859;

830 0 a| AIP conference proceedings ;v| no. 683.=| ^A24766;

856 40 z| Full text available from AIP Conference Proceedingsu| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fpubs.aip.org%2Faip%2Facp%2Fissue%2F683%2F1;

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Characterization and metrology for ULSI technology 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March, 2003 / editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards and Technology ... [et al.].

Author/creator	International Conference on Characterization and Metrology for ULSI Technology
Other author	Seiler, David G.
Other author	National Institute of Standards and Technology (U.S.)
Format	Electronic
Publication Info	Melville, N.Y. : American Institute of Physics,
Description	xviii, 818 p. : ill. ; 28 cm. + 1 CD-ROM (4 3/4 in.)
Supplemental Content	Full text available from AIP Conference Proceedings
Subjects	Integrated circuits--Ultra large scale integration. --Congresses. Integrated circuits--Ultra large scale integration. --Congresses. --Software.

Series	AIP conference proceedings, 0094-243X ; v. 683 AIP conference proceedings ; no. 683. ^A24766
Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2003111108
ISBN	0735401527

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Characterization and metrology for ULSI technology 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March, 2003 / editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards and Technology ... [et al.].

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