Deposition and Growth Limits for Microelectronics
| Other author | Rubloff, Gary Editor |
| Other author | Lucovsky, Gerald Editor |
| Format | Electronic |
| Publication Info | College Park : American Institute of Physics Secaucus : Springer [Distributor] |
| Description | 402 p. ill 23.000 x 016.000 cm. |
| Supplemental Content | Full text available from AIP Conference Proceedings |
| Subjects |
| Series | Conference Proceedings Ser. High Energy Physics No. 167 |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| ISBN | 9780883183670 |
| ISBN | 0883183676 (Trade Cloth) Out of Stock Indefinitely |
| Standard identifier# | 9780883183670 |
| Stock number | 00001366 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |