Digest of papers microprocesses and nanotechnology 2005 2005 International Microprocesses and Nanotechnology Conference, October 25-28, 2005, conference (October 25 technical seminar, 26-28 conference), Hotel Bellclassic Tokyo, Japan / sponsored by the Japan Society of Applied Physics, technical-cosponsored IEEE Electron Device Society ; cooperation American Vacuum Society ... [et al.].
| Author/creator | International Microprocesses and Nanotechnology Conference |
| Other author | IEEE Xplore (Online service) |
| Format | Electronic |
| Publication Info | Tokyo, Japan : Japan Society of Applied Physics, |
| Description | xxiii, 295 p. : ill. ; 28 cm. |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) Conference Proceedings |
| Supplemental Content | Full text available from IEEE Conference Proceedings Archive 2005-2009 |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2006278941 |
| ISBN | 4990247221 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | ✔ Available |