Emerging semiconductor technology a symposium / sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors.
| Format | Electronic |
| Publication Info | Philadelphia, PA : American Society for Testing and Materials, |
| Description | 704 p. : ill. ; 24 cm. |
| Supplemental Content | Full text available from ASTM Standards and Engineering Digital Library |
| Subjects |
| Other author/creator | Gupta, D. C. (Dinesh C.) |
| Other author/creator | Langer, Paul H. |
| Other author/creator | ASTM Committee F-1 on Electronics. |
| Other author/creator | Symposium on Semiconductor Processing 1986 : San Jose, Calif.) (4th : |
| Series | ASTM special technical publication ; 960 |
| General note | Papers presented at the Fourth International Symposium on Semiconductor Processing. |
| General note | "ASTM publication code number (PCN) 04-960000-46." |
| Bibliography note | Includes bibliographies and indexes. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 86028761 |
| ISBN | 0803104596 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |