IIT 2002 proceedings ion implementation technology : 2002 14th International Conference on Ion Implantation Technology proceedings, Taos, New Mexico, USA, 22-27 September 2002 / editors, Bob Brown ... [et al.].
| Author/creator | International Conference on Ion Implantation Technology |
| Other author | Brown, Bob (Of ATMI, Inc.) |
| Other author | Institute of Electrical and Electronics Engineers. |
| Other author | IEEE Xplore (Online service) |
| Format | Electronic |
| Publication Info | Piscataway, NJ : IEEE, |
| Description | xxiv, 725 p. : ill. (some col.) ; 28 cm. |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) Conference Proceedings |
| Subjects |
| Bibliography note | Includes bibliographical references and index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2001092104 |
| ISBN | 0780371550 pbk. |
| ISBN | 9780780371552 (pbk.) |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | ✔ Available |