Semiconductor fabrication technology and metrology / Dinesh C. Gupta, editor.

Format Electronic
Publication InfoPhiladelphia, PA : ASTM,
Description476 p. : ill. ; 24 cm.
Supplemental ContentFull text available from ASTM Standards and Engineering Digital Library
Subjects
Semiconductors--Design and construction. --Congresses.

Other author/creatorGupta, D. C. (Dinesh C.)
Other author/creatorASTM Committee F-1 on Electronics.
Other author/creatorSemiconductor Equipment and Materials Institute.
Other author/creatorSymposium on Semiconductor Processing 1988 : Santa Clara, Calif.) (5th :
SeriesSTP ; 990
ASTM special technical publication 990. ^A8751
General notePapers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute.
General note"ASTM publication code number (PCN) 04-990000-46"--T.p. verso.
Bibliography noteIncludes bibliographical references and indexes.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 89033789
ISBN0803112734