Semiconductor processing a symposium / sponsored by ASTM Committee F-1 on Electronics ... [et al.], San Jose, CA, 7-10 Feb., 1984 ; D.C. Gupta, editor.
| Other author | Gupta, D. C. (Dinesh C.) |
| Other author | ASTM Committee F-1 on Electronics. |
| Other author | Symposium on Semiconductor Processing 1984 : San Jose, Calif.) |
| Format | Electronic |
| Publication Info | Philadelphia, PA : ASTM, |
| Description | 671 p. : ill. ; 24 cm. |
| Supplemental Content | Full text available from ASTM Standards and Engineering Digital Library |
| Subjects |
| Series | ASTM special technical publications ; 850 ASTM special technical publication 850. ^A8751 |
| General note | "ASTM publication code number (PCN) 04-850000-46." |
| Bibliography note | Includes bibliographies and index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 84018476 |
| ISBN | 0803104030 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |