Stress induced phenomena in metallization fifth international workshop, Stuttgart, Germany, June, 1999 / editors, Oliver Kraft ... [et al.].

Other author Kraft, Oliver.
Other author International Workshop on Stress-Induced Phenomena in Metallization 1999 : Stuttgart, Germany)
Format Electronic
Publication InfoMelville, N.Y. : American Institute of Physics,
Descriptionix, 318 p. : ill. ; 25 cm.
Supplemental ContentFull text available from AIP Conference Proceedings
Subjects
Integrated circuits--Defects. --Congresses.
Thin film devices--Defects. --Congresses.
Electrodiffusion--Congresses.
Metallic films--Congresses.
Electrochemical metallizing--Congresses.
Aluminum films--Congresses.
Semiconductors--Defects. --Congresses.
Liquid crystal devices--Defects. --Congresses.
Acoustic surface wave devices--Defects. --Congresses.

SeriesAIP conference proceedings ; 491
AIP conference proceedings ; no. 491. ^A24766
Bibliography noteIncludes bibliographical references and index.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 99460336
ISBN1563969041

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