Photoacoustic infrared spectroscopy of thin polyimide layers on glass substrates / Brian Dickens ; sponsored by the NIST Office of Microelectronics Programs.
| Author/creator | Dickens, Brian |
| Other author | National Institute of Standards and Technology (U.S.) |
| Format | Microform |
| Publication Info | [Gaithersburg, MD] : U.S. Department of Commerce, Technology Administration, National Institute of Standards and Technology, [1997] |
| Description | 30 pages, 19 unnumbered pages : illustrations ; 28 cm. |
| Subjects |
| Series | NISTIR ; 6097 NISTIR ; 6097. ^A682451 |
| General note | Shipping list no.: 98-0577-M. |
| General note | "December 1997." |
| Bibliography note | Includes bibliographical references (p. 19-20). |
| Reproduction note | Joyner- Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1998] 1 microfiche : negative. |
| GPO item number | 0247-D (MF) |
| Govt. docs number | C 13.58:6097 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Microforms B300 | C 13.58:6097 | ✔ Available |