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005 20190313051101.0;

006 m d ;

007 cr n ;

008 101013s2011 enka sb 001 0 eng d;

010 a| 2010040731;

016 7 a| 0156194822| Uk;

020 a| 9781848212022 (hardback);

020 a| 184821202X (hardback);

035 a| (WaSeSS)ssj0000833569;

042 a| pcc;

049 a| EREEa| NEHH;

050 00 a| TK7872.M3b| L58 2011;

082 00 a| 621.3815/312| 22;

084 a| TEC0210002| bisacsh;

245 00 a| Lithographyh| [electronic resource] :b| main techniques /c| edited by Stefan Landis.;

260 a| London :b| ISTE ;a| Hoboken, NJ :b| Wiley,;

300 a| xxv, 377 p. :b| ill. ;c| 25 cm.;

504 a| Includes bibliographical references and index.;

506 a| Available only to authorized users.;

520 a| "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--c| Provided by publisher.;

538 a| Mode of access: World Wide Web;

650 0 a| Microlithography.=| ^A835808;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Landis, Stefan.?| UNAUTHORIZED;

856 40 z| Full text available from Ebook Central - Academic Completeu| https://ebookcentral.proquest.com/lib/eastcarolina/detail.action?docID=1143629;

947 a| (OCoLC)ocn500823606;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 4481358;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4481358-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 7/21/2016x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4481358-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 7/21/2016x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4481358-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 7/21/2016x| EBOOKz| JERESOURCE;

Lithography main techniques / edited by Stefan Landis.

Other author	Landis, Stefan.
Format	Electronic
Publication Info	London : ISTE ; Hoboken, NJ : Wiley,
Description	xxv, 377 p. : ill. ; 25 cm.
Supplemental Content	Full text available from Ebook Central - Academic Complete
Subjects	Microlithography.

Abstract	"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher.
Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2010040731
ISBN	9781848212022 (hardback)
ISBN	184821202X (hardback)

Lithography main techniques / edited by Stefan Landis.

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