Tools

LEADER 02757cam 22005417a 4500

001 ssj0000393514;

003 WaSeSS;

005 20240512155341.0;

006 m d ;

007 cr n ;

008 020306s2002 njua sb 100 0 eng d;

010 a| 2002103269;

020 a| 0780374657;

035 a| (WaSeSS)ssj0000393514;

042 a| lccopycat;

049 a| EREEa| NEHH;

050 00 a| TK7871.85b| .I5743 2002;

111 2 a| International Conference on Advanced Thermal Processing of Semiconductorsn| (10th :d| 2002 :c| Vancouver, B.C.)?| UNAUTHORIZED;

245 10 a| 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002h| [electronic resource] :b| September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada /c| editors, J. Gelpey ... [et al.] ; IEEE Electron Devices Society.;

246 30 a| Advanced thermal processing of semiconductors;

246 30 a| RTP 2002;

260 a| Piscataway, NJ :b| IEEE,;

300 a| [ix], 241 p. :b| ill. ;c| 28 cm.;

500 a| "IEEE Catalog Number: 02EX574"--T.p. verso.;

504 a| Includes bibliographical references.;

506 a| Available only to authorized users.;

530 a| Also available via the World Wide Web.;

538 a| Mode of access: World Wide Web;

650 0 a| Semiconductorsx| Heat treatmentv| Congresses.=| ^A1156410;

650 0 a| Rapid thermal processingv| Congresses.?| UNAUTHORIZED;

650 0 a| Semiconductor dopingv| Congresses.=| ^A1242416;

650 0 a| Semiconductorsx| Defectsv| Congresses.=| ^A654219;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Gelpey, Jeffrey C.?| UNAUTHORIZED;

710 2 a| IEEE Electron Devices Society.=| ^A85580;

710 2 a| IEEE Xplore (Online service)=| ^A534875;

856 40 z| Full text available from IEEE Electronic Library (IEL) Conference Proceedingsu| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fieeexplore.ieee.org%2Fservlet%2Fopac%3Fpunumber%3D8060;

856 40 z| Full text available from IEEE Electronic Library (IEL)u| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fieeexplore.ieee.org%2Fservlet%2Fopac%3Fpunumber%3D8060;

947 a| (OCoLC)ocm50756432;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 4665522;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4665522-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 3/19/2017x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4665522-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 3/19/2017x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4665522-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 3/19/2017x| EBOOKz| JERESOURCE;

10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada / editors, J. Gelpey ... [et al.] ; IEEE Electron Devices Society.

Author/creator	International Conference on Advanced Thermal Processing of Semiconductors
Other author	Gelpey, Jeffrey C.
Other author	IEEE Electron Devices Society.
Other author	IEEE Xplore (Online service)
Format	Electronic
Publication Info	Piscataway, NJ : IEEE,
Description	[ix], 241 p. : ill. ; 28 cm.
Supplemental Content	Full text available from IEEE Electronic Library (IEL) Conference Proceedings
Supplemental Content	Full text available from IEEE Electronic Library (IEL)
Subjects	Semiconductors--Heat treatment. --Congresses. Rapid thermal processing--Congresses. Semiconductor doping--Congresses. Semiconductors--Defects. --Congresses.

Portion of title	Advanced thermal processing of semiconductors
Portion of title	RTP 2002
General note	"IEEE Catalog Number: 02EX574"--T.p. verso.
Bibliography note	Includes bibliographical references.
Access restriction	Available only to authorized users.
Other forms	Also available via the World Wide Web.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2002103269
ISBN	0780374657

10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada / editors, J. Gelpey ... [et al.] ; IEEE Electron Devices Society.

Click here for more information about this title