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020 a| 0780375955;

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111 2 a| IEEE/LEOS International Conference on Optical MEMSd| (2002 :c| Lugano, Switzerland)?| UNAUTHORIZED;

245 10 a| 2002 IEEE/LEOS International Conference on Optical MEMsh| [electronic resource] :b| conference digest : 20-23 August, 2002, Hotel de la Paix, Lugano, Switzerland /c| sponsored by IEEE Lasers and Electro-Optics Society.;

260 a| Piscataway, N.J. :b| IEEE,;

300 a| 211 p. :b| ill. ;c| 28 cm.;

500 a| "IEEE Catalog Number: 02EX610"--T.p. verso.;

504 a| Includes bibliographical references and index.;

506 a| Available only to authorized users.;

530 a| Also available via the World Wide Web.;

538 a| Mode of access: World Wide Web;

650 0 a| Microelectromechanical systemsv| Congresses.=| ^A728197;

650 0 a| Optoelectronic devicesv| Congresses.=| ^A653434;

650 0 a| Optical MEMSv| Congresses.=| ^A1057251;

655 0 a| Electronic books.=| ^A491897;

710 2 a| Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers)=| ^A212489;

710 2 a| IEEE Xplore (Online service)=| ^A534875;

856 40 z| Full text available from IEEE Electronic Library (IEL)u| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fieeexplore.ieee.org%2Fservlet%2Fopac%3Fpunumber%3D8020;

856 40 z| Full text available from IEEE Electronic Library (IEL) Conference Proceedingsu| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fieeexplore.ieee.org%2Fservlet%2Fopac%3Fpunumber%3D8020;

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999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4666313-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 3/19/2017x| EBOOKz| JERESOURCE;

2002 IEEE/LEOS International Conference on Optical MEMs conference digest : 20-23 August, 2002, Hotel de la Paix, Lugano, Switzerland / sponsored by IEEE Lasers and Electro-Optics Society.

Author/creator	IEEE/LEOS International Conference on Optical MEMS
Other author	Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers)
Other author	IEEE Xplore (Online service)
Format	Electronic
Publication Info	Piscataway, N.J. : IEEE,
Description	211 p. : ill. ; 28 cm.
Supplemental Content	Full text available from IEEE Electronic Library (IEL)
Supplemental Content	Full text available from IEEE Electronic Library (IEL) Conference Proceedings
Subjects	Microelectromechanical systems--Congresses. Optoelectronic devices--Congresses. Optical MEMS--Congresses.

General note	"IEEE Catalog Number: 02EX610"--T.p. verso.
Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Other forms	Also available via the World Wide Web.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2002108420
ISBN	0780375955

2002 IEEE/LEOS International Conference on Optical MEMs conference digest : 20-23 August, 2002, Hotel de la Paix, Lugano, Switzerland / sponsored by IEEE Lasers and Electro-Optics Society.

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