2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
| Author/creator | IEEE, Components, Packaging and Manufacturing Technology Society Staff |
| Other author | IEEE, Electron Devices Society Staff. |
| Other author | IEEE Xplore (Online service) |
| Format | Electronic |
| Publication Info | Piscataway : I E E E |
| Description | 440 p. 28.000 x 022.000 cm. |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) Conference Proceedings |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) |
| Subjects |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| ISBN | 9780780371583 |
| ISBN | 0780371585 (Trade Paper) Active Record |
| Standard identifier# | 9780780371583 |
| Stock number | 02CH37259 00066573 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | ✔ Available |