IEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and Workshop theme, "Semiconductor manufacturing : economic solutions for the 21st century" : ASMC 95 proceedings, November 13-15, 1995, Cambridge, Massachusetts.

Author/creator IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Other author Institute of Electrial and Electronics Engineers.
Other author Semiconductor Equipment and Materials International.
Other author IEEE Xplore (Online service)
Format Electronic
Publication InfoNew York : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center [distributor],
Description[ix], 391 p. : ill. ; 28 cm.
Supplemental ContentFull text available from IEEE Electronic Library (IEL) Conference Proceedings
Supplemental ContentFull text available from IEEE Conference Proceedings Archive
Supplemental ContentFull text available from IEEE Electronic Library (IEL)
Subjects
Semiconductor industry--Congresses.
Semiconductors--Design and construction. --Congresses.
Process control--Congresses.

Variant title 1995 Advanced Semiconductor Manufacturing Conference and Workshop
Other title Semiconductor manufacturing, economic solutions for the 21st century
General notePRIORITY 2.
General note"IEEE catalog number 95CH35811"--T.p. verso.
Bibliography noteIncludes bibliographical references.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 97102079
ISBN0780327136 (softbound)
ISBN0780327144 (casebound)
ISBN0780327152 (microfiche)

Availability

Library Location Call Number Status Item Actions
Electronic Resources ✔ Available