Ion implantation technology--96 proceedings of the Eleventh International Conference on Ion Implantation Technology, Austin, Texas, USA, June 16-21, 1996 / editors Emi Ishidida [sic] ... [et al.].

Author/creator International Conference on Ion Implantation Technology
Other author Ishida, Emi.
Other author IEEE Xplore (Online service)
Format Electronic
Publication InfoPiscataway, N.J. : Institute of Electrical and Electronics Engineers,
Descriptionxxvii, 832 p. : ill. ; 27 cm.
Supplemental ContentFull text available from IEEE Electronic Library (IEL)
Supplemental ContentFull text available from IEEE Electronic Library (IEL) Conference Proceedings
Supplemental ContentFull text available from IEEE Conference Proceedings Archive
Subjects

General note"96TH8182"--Cover.
Bibliography noteIncludes bibliographical references and index.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 96075709
ISBN078033289X

Availability

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Electronic Resources ✔ Available