/LC.GIF&client=easterncarolinaedu)
Ion implantation technology--1998 1998 International Conference on Ion Implantation Technology : Proceedings, Kyoto, Japan, June 22-26, 1998 / editors, J. Matsuo, G. Takaoka, I. Yamada.
| Author/creator | International Conference on Ion Implantation Technology |
| Format | Electronic |
| Publication Info | New York City, NY : The Institute of Electrical and Electronics Engineers, Inc., |
| Description | v. <1 > : ill. ; 28 cm. |
| Supplemental Content | Full text available from IEEE Conference Proceedings Archive |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) Conference Proceedings |
| Subjects |
| Other author/creator | Matsuo, J. |
| Other author/creator | Takaoka, G. |
| Other author/creator | Yamada, I. (Isao) |
| Other author/creator | IEEE Electron Devices Society. |
| Other author/creator | IEEE Xplore (Online service) |
| Cover title | Iit '98 Kyoto |
| Spine title | 1998 International Conference on Ion Implantation Technology proceedings. |
| General note | "98EX144"--Cover. |
| General note | Cosponsors : Electron Devices Society, the IEEE ... |
| Bibliography note | Includes bibliographical references and index. |
| Access restriction | Available only to authorized users. |
| Other forms | Also available via the World Wide Web with additional title: Ion Implantation Technology proceedings, 1998 International Conference on. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| Other title | Ion Implantation Technology proceedings, 1998 International Conference on. |
| LCCN | 98084232 |
| ISBN | 078034538X (softbound edition) |
| ISBN | 0780345398 (microfiche edition) |