RTP 2003 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC / editors, J. Gelpey ... [et al.] ; IEEE EDS.

Author/creator International Conference on Advanced Thermal Processing of Semiconductors
Other author Gelpey, Jeffrey C.
Other author IEEE Electron Devices Society.
Other author IEEE Xplore (Online service)
Format Electronic
Publication InfoPiscataway, N.J. : IEEE,
Descriptionxi, 220 p. : ill. ; 28 cm.
Supplemental ContentFull text available from IEEE Electronic Library (IEL)
Supplemental ContentFull text available from IEEE Electronic Library (IEL) Conference Proceedings
Subjects
Semiconductors--Heat treatment. --Congresses.
Rapid thermal processing--Congresses.
Semiconductor doping--Congresses.
Semiconductors--Defects. --Congresses.

Portion of title Advanced thermal processing of semiconductors
General note"IEEE Catalog Number: 03EX696"--T.p. verso.
Bibliography noteIncludes bibliographical references.
Access restrictionAvailable only to authorized users.
Other formsAlso available via the World Wide Web with additional title: Advanced Thermal Processing of Semiconductors, 2003, RTP 2003, 11th IEEE International Conference on.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
Other titleAdvanced Thermal Processing of Semiconductors, 2003, RTP 2003, 11th IEEE International Conference on.
LCCN 2003103049
ISBN0780378741