Proceedings IEEE the twentieth annual International Conference on Micro Electro Mechanical Systems Hyogo, Japan, 21-25 January 2007 / IEEE.

Portion of title Micro electro mechanical systems
General note"IEEE catalog number: CFP07MEM-PRT."
General noteIncludes bibliographical references and indexes.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 2009285074
ISBN1424409500 (pbk. : set)
ISBN9781424409501 (pbk. : set)

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