Silicon Processing
| Author/creator | Gupta, D. C. Author |
| Format | Electronic |
| Publication Info | West Conshohocken : American Society for Testing & Materials |
| Description | 559 p. |
| Supplemental Content | Full text available from ASTM Standards and Engineering Digital Library |
| Subjects |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 82083529 |
| ISBN | 9780803102439 |
| ISBN | 0803102437 (Trade Paper) On Demand |
| Standard identifier# | 9780803102439 |
| Stock number | STP804 00001664 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |