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111 2 a| IEEE International Conference on Advanced Thermal Processing of Semiconductors.?| UNAUTHORIZED;

210 0 a| IEEE Int. Conf. Adv. Therm. Processing Semicond.b| (Online);

222 0 a| IEEE International Conference on Advanced Thermal Processing of Semiconductorsb| (Online);

240 10 a| IEEE International Conference on Advanced Thermal Processing of Semiconductors (Online)?| UNAUTHORIZED;

245 10 a| IEEE International Conference on Advanced Thermal Processing of Semiconductorsh| [electronic resource] :b| RTP.;

246 30 a| RTP;

246 30 a| Advanced thermal processing of semiconductors;

246 13 a| Rapid Thermal Processing;

246 13 a| Proceedings of the IEEE International Conference on Advanced Thermal Processing of Semiconductors;

260 a| Piscataway, N.J. :b| IEEE,c| ℗♭2002-;

310 a| Annual;

362 0 a| 10th (Sept. 25-27, 2002)-;

500 a| Title from PDF of title page (viewed August 10, 2004).;

506 a| Available only to authorized users.;

530 a| Also available in print.;

538 a| Mode of access: World Wide Web.;

588 1 a| 16th (Sept. 30 - Oct. 3, 2008) (IEEE Xplore, viewed Apr 16, 2009).;

650 0 a| Semiconductorsx| Heat treatmentv| Congresses.=| ^A1156410;

650 0 a| Rapid thermal processingv| Congresses.?| UNAUTHORIZED;

650 0 a| Semiconductor dopingv| Congresses.=| ^A1242416;

650 0 a| Semiconductorsx| Defectsv| Congresses.=| ^A654219;

655 0 a| Electronic journals.=| ^A353035;

710 2 a| IEEE Xplore (Online service)=| ^A534875;

780 00 a| International Conference on Advanced Thermal Processing of Semiconductors.s| RTP ... (Online)w| (DLC) 2007242214w| (OCoLC)55892456;

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IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP.

Author/creator	IEEE International Conference on Advanced Thermal Processing of Semiconductors
Other author	IEEE Xplore (Online service)
Format	Electronic
Publication Info	Piscataway, N.J. : IEEE, ℗♭2002-
Supplemental Content	Click here for full text
Subjects	Semiconductors--Heat treatment. --Congresses. Rapid thermal processing--Congresses. Semiconductor doping--Congresses. Semiconductors--Defects. --Congresses.

Uniform title	IEEE International Conference on Advanced Thermal Processing of Semiconductors (Online)
Portion of title	RTP
Portion of title	Advanced thermal processing of semiconductors
Other title	Rapid Thermal Processing
Other title	Proceedings of the IEEE International Conference on Advanced Thermal Processing of Semiconductors
Frequency	Annual
General note	Title from PDF of title page (viewed August 10, 2004).
Access restriction	Available only to authorized users.
Other forms	Also available in print.
Technical details	Mode of access: World Wide Web.
Source of description	16th (Sept. 30 - Oct. 3, 2008) (IEEE Xplore, viewed Apr 16, 2009).
Preceding title	International Conference on Advanced Thermal Processing of Semiconductors. RTP ... (Online)
Issued in other form	Print version: IEEE International Conference on Advanced Thermal Processing of Semiconductors 1944-0251
Genre/form	Electronic journals.
LCCN	2007242215
ISSN	1944-026X
Stock number	IEEE 445 Hoes Ln., Piscataway, NJ 08854

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IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP.

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