2008 International Symposium on Semiconductor Manufacturing
| Author/creator | IEEE Staff |
| Other author | IEEE Xplore (Online service) |
| Format | Electronic |
| Publication Info | Piscataway : IEEE |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) |
| Supplemental Content | Full text available from IEEE Conference Proceedings Archive 2005-2009 |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) Conference Proceedings |
| Subjects |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| ISBN | 9781612849485 |
| ISBN | 1612849482 (Trade Paper) On Demand |
| Stock number | 00066573 |