Digest of papers Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan / sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.].
| Author/creator | International Microprocesses and Nanotechnology Conference |
| Format | Electronic |
| Publication Info | Tokyo, Japan : Japan Society of Applied Physics, |
| Description | xxvii, 349 p. : ill. ; 28 cm. |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) Conference Proceedings |
| Subjects |
| Other author/creator | IEEE Electron Devices Society. |
| Other author/creator | Ōyō Butsuri Gakkai. |
| Other author/creator | American Vacuum Society. |
| Other author/creator | IEEE Xplore (Online service) |
| General note | "IEEE Catalog Number: 04EX934"--T.p. verso. |
| Bibliography note | Includes bibliographical references and author index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2006399319 |
| ISBN | 4990247205 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | ✔ Available |