25th European Mask and Lithography Conference 12-15 January 2009 / European Mask and Lithography Conference.
| Other author | European Mask and Lithography Conference. |
| Other author | IEEE Xplore (Online service) |
| Format | Electronic |
| Publication Info | [S.l.] : VDE, |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) Conference Proceedings |
| General note | Title from content provider. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |