Gettering and defect engineering in semiconductor technology XV selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference (GADEST 2013), September 22-27, 2013, Oxford, UK / edited by J.D. Murphy.
| Other author | Murphy, J. D. |
| Format | Electronic |
| Publication Info | Durnten-Zurich : Trans Tech publications Ltd, [2014] |
| Description | xiv, 516 pages : illustrations (black and white) ; 24 cm. |
| Supplemental Content | Full text available from Ebook Central - Academic Complete |
| Subjects |
| Series | Diffusion and defect data. Pt. B, Solid state phenomena, 1012-0394 ; volumes 205/206 Diffusion and defect data. Pt. B, Solid state phenomena ; v. 205/206. ^A1003549 |
| Bibliography note | Includes bibliographical references and index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Terms of use | Current copyright fee: GBP18.00 50\0. |
| Genre/form | Electronic books. |
| LCCN | 2016439324 |
| ISBN | 9783037858240 (paperback) |
| ISBN | 3037858249 (paperback) |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |