Handbook of Silicon Based MEMS Materials and Technologies
| Author/creator | Lindroos, Veikko Author |
| Other author | Tilli, Markku Author |
| Other author | Lehto, Ari Author |
| Other author | Motooka, Teruaki Author |
| Format | Electronic |
| Publication Info | Burlington : William Andrew, Incorporated Saint Louis : Elsevier [Distributor] |
| Supplemental Content | Full text available from eBook - Materials Science 2010 (Elsevier and Woodhead) [EBCMS10W] |
| Subjects |
| Summary | Annotation A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.Key topics covered include:Silicon as MEMS materialMaterial properties and measurement techniquesAnalytical methods used in materials characterizationModeling in MEMSMeasuring MEMSMicromachining technologies in MEMSEncapsulation of MEMS componentsEmerging process technologies, including ALD and porous siliconWritten by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities.Veikko Lindroosis Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland.Markku Tilliis Senior Vice President of Research at Okmetic, Vantaa, Finland.Ari Lehtois Professor of Silicon Technology at Helsinki University of Technology, Finland.Teruaki Motookais Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| ISBN | 9780815519881 |
| ISBN | 0815519885 (E-Book) Active Record |
| Standard identifier# | 9780815519881 |
| Stock number | 00094317 |