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010 a| 2012360034;

020 a| 9783037852859 (pbk.);

020 a| 3037852852 (pbk.);

035 a| (WaSeSS)ssj0000751468;

042 a| lccopycat;

049 a| EREEa| NEHH;

050 00 a| TK7871.15.S55b| S5552 2010;

082 00 a| 620.1/932| 23;

245 00 a| Silicon science and advances micro-device engineering IIh| [electronic resource] :b| selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-device Engineering, December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /c| edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura.;

246 30 a| Selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering, December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan;

260 a| Durnten-Zurich, Switzerland :b| Trans Tech,;

300 a| 312 p. :b| ill. ;c| 24 cm.;

490 1 a| Key engineering materials,x| 1013-9826 ;v| v. 497;

504 a| Includes bibliographical references and index.;

505 0 a| Chapter 1: Material science -- Chapter 2: Chemical science and techology -- Chapter 3: Nano-science and technology -- Chapter 4: Photonics device and technology -- Chapter 5: Novel measurement and system technology -- Chapter 6: Information and communication engineering.;

506 a| Available only to authorized users.;

520 a| This special collection of 39 peer-reviewed papers imparts the latest findings related to silicon science and advanced micro-device engineering. The papers are grouped into the chapters: Materials Science; Chemical Science and Technology; Nano-Science and Technology; Photonic Devices and Technology; Novel Measurement and System Technology; Information and Communication Engineering; thus offering an up-to-date overview of the subject matter--c| Source other than Library of Congress.;

538 a| Mode of access: World Wide Web;

650 0 a| Siliconv| Congresses.=| ^A1156977;

650 0 a| Nanostructuresv| Congresses.=| ^A562884;

650 0 a| Microtechnologyv| Congresses.=| ^A1335826;

650 0 a| Mechatronicsv| Congresses.=| ^A728093;

655 0 a| Electronic books.=| ^A491897;

711 2 a| International Symposium on Silicon Science.?| UNAUTHORIZED;

711 2 a| International Conference on Advanced Micro-Device Engineering.?| UNAUTHORIZED;

830 0 a| Key engineering materials ;v| v. 497.=| ^A516911;

856 40 z| Full text available from Ebook Central - Academic Completeu| https://ebookcentral.proquest.com/lib/eastcarolina/detail.action?docID=1872733;

947 a| (OCoLC)ocn774855392;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

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998 a| 4992903;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4992903-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 12/10/2018x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4992903-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 12/10/2018x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4992903-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 12/10/2018x| EBOOKz| JERESOURCE;

Silicon science and advances micro-device engineering II selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-device Engineering, December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan / edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura.

Other author	International Symposium on Silicon Science.
Other author	International Conference on Advanced Micro-Device Engineering.
Format	Electronic
Publication Info	Durnten-Zurich, Switzerland : Trans Tech,
Description	312 p. : ill. ; 24 cm.
Supplemental Content	Full text available from Ebook Central - Academic Complete
Subjects	Silicon--Congresses. Nanostructures--Congresses. Microtechnology--Congresses. Mechatronics--Congresses.

Portion of title	Selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering, December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan
Series	Key engineering materials, 1013-9826 ; v. 497 Key engineering materials ; v. 497. ^A516911
Contents	Chapter 1: Material science -- Chapter 2: Chemical science and techology -- Chapter 3: Nano-science and technology -- Chapter 4: Photonics device and technology -- Chapter 5: Novel measurement and system technology -- Chapter 6: Information and communication engineering.
Abstract	This special collection of 39 peer-reviewed papers imparts the latest findings related to silicon science and advanced micro-device engineering. The papers are grouped into the chapters: Materials Science; Chemical Science and Technology; Nano-Science and Technology; Photonic Devices and Technology; Novel Measurement and System Technology; Information and Communication Engineering; thus offering an up-to-date overview of the subject matter-- Source other than Library of Congress.
Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2012360034
ISBN	9783037852859 (pbk.)
ISBN	3037852852 (pbk.)

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