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010 a| 2015937707;

020 a| 9780323299657 (hbk.);

020 a| 0323299652 (hbk.);

035 a| (WaSeSS)ssj0001777697;

042 a| lccopycat;

049 a| EREEa| NEHH;

050 00 a| TK7875b| .H36 2015;

082 04 a| 621.38152;

245 00 a| Handbook of silicon based MEMS materials and technologiesh| [electronic resource] /c| edited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos.;

250 a| Second edition.;

260 a| Amsterdam :b| William Anderew is an imprint of Elsevier,c| 2015.;

300 a| xxxvii, 787 pages :b| illustrations ;c| 29 cm.;

490 1 a| Micro & nano technologies series;

504 a| Includes bibliographical references and index.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Microelectromechanical systems.=| ^A424252;

650 0 a| Microelectromechanical systemsx| Materials.=| ^A424252;

650 0 a| Siliconx| Electric properties.=| ^A420609;

650 7 a| Microelectromechanical systems.2| fast0| (OCoLC)fst01019745;

650 7 a| Microelectromechanical systemsx| Materials.2| fast0| (OCoLC)fst01019748;

650 7 a| Siliconx| Electric properties.2| fast0| (OCoLC)fst01118637;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Markku, Tilli.?| UNAUTHORIZED;

830 0 a| Micro & nano technologies.=| ^A1060517;

856 40 z| Full text available from eBook - Materials Science 2015 [EBCMS15]u| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fwww.sciencedirect.com%2Fscience%2Fbook%2F9780323299657;

856 40 z| Full text available from Ebook Central - Academic Completeu| https://ebookcentral.proquest.com/lib/eastcarolina/detail.action?docID=4003527;

947 a| (OCoLC)ocn921939919;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 5193172;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5193172-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 11/1/2019x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5193172-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 11/1/2019x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5193172-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 11/1/2019x| EBOOKz| JERESOURCE;

Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos.

Other author	Markku, Tilli.
Format	Electronic
Edition	Second edition.
Publication Info	Amsterdam : William Anderew is an imprint of Elsevier, 2015.
Description	xxxvii, 787 pages : illustrations ; 29 cm.
Supplemental Content	Full text available from eBook - Materials Science 2015 [EBCMS15]
Supplemental Content	Full text available from Ebook Central - Academic Complete
Subjects	Microelectromechanical systems. Microelectromechanical systems--Materials. Silicon--Electric properties.

Series	Micro & nano technologies series Micro & nano technologies. ^A1060517
Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2015937707
ISBN	9780323299657 (hbk.)
ISBN	0323299652 (hbk.)

Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos.

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