Materials and processes for next generation lithography / edited by Alex Robinson, Richard Lawson.
| Other author | Robinson, Alex. |
| Other author | Lawson, Richard. |
| Format | Electronic |
| Publication Info | Amsterdam : Elsevier, [2016] |
| Description | xxv, 608 pages : illustrations ; 25 cm. |
| Supplemental Content | Full text available from eBook - Materials Science 2016 [EBCMS16] |
| Subjects |
| Series | Frontiers of nanoscience, 1876-2778 ; v. 11 Frontiers of nanoscience ; v. 11. ^A1010891 |
| General note | Includes index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Issued in other form | ebook version : 9780081003589 |
| Genre/form | Electronic books. |
| LCCN | 2016461804 |
| ISBN | 9780081003541 |
| ISBN | 0081003544 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |