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020 a| 0841214751;

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040 a| DLCc| DLCd| DLCd| WaSeSS;

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050 00 a| QD1b| .A355 no. 221a| TK7874;

082 00 a| 621.3812| 20;

245 00 a| Microelectronics processingh| [electronic resource] :b| chemical engineering aspects /c| Dennis W. Hess, editor, Klavs F. Jensen, editor.;

260 a| Washington, DC :b| American Chemical Society,;

300 a| xiv, 547 p. :b| ill. ;c| 24 cm.;

440 0 a| Advances in chemistry series,x| 0065-2393 ;v| 221;

504 a| Includes bibliographical references.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Microelectronicsx| Materials.=| ^A35901;

650 0 a| Integrated circuitsx| Design and construction.=| ^A164350;

650 0 a| Surface chemistry.=| ^A4243;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Hess, Dennis W.=| ^A243427;

700 1 a| Jensen, Klavs F.,d| 1952-=| ^A223081;

856 40 z| Full text available from Advances in Chemistry Seriesu| https://go.openathens.net/redirector/ecu.edu?url=http%3A%2F%2Fpubs.acs.org%2Fisbn%2F9780841214750%3FprevSearch%3D%26searchHistoryKey%3D;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 5268690;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5268690-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 3/14/2020x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5268690-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 3/14/2020x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5268690-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 3/14/2020x| EBOOKz| JERESOURCE;

Microelectronics processing chemical engineering aspects / Dennis W. Hess, editor, Klavs F. Jensen, editor.

Other author	Hess, Dennis W.
Other author	Jensen, Klavs F., 1952-
Format	Electronic
Publication Info	Washington, DC : American Chemical Society,
Description	xiv, 547 p. : ill. ; 24 cm.
Supplemental Content	Full text available from Advances in Chemistry Series
Subjects	Microelectronics--Materials. Integrated circuits--Design and construction. Surface chemistry.

Series	Advances in chemistry series, 0065-2393 ; 221
Bibliography note	Includes bibliographical references.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	89006862
ISBN	0841214751

Microelectronics processing chemical engineering aspects / Dennis W. Hess, editor, Klavs F. Jensen, editor.

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