Fundamentals of microfabrication and nanotechnology. from MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / Volume III / Madou, Marc J.
| Author/creator | Madou, Marc J. |
| Format | Electronic |
| Edition | Third edition. |
| Publication Info | [S.l.] : CRC Press, |
| Supplemental Content | Full text available from Ebook Central - Academic Complete |
| General note | Title from content provider. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |