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010 a| 2011377926;

016 7 a| 0158402752| Uk;

020 a| 9783037851456 (pbk.);

020 a| 3037851457 (pbk.);

035 a| (WaSeSS)ssj0000787351;

042 a| pcc;

049 a| EREEa| NEHH;

050 00 a| TK7875b| .I538 2011;

111 2 a| International Conference on Materials for Advanced Technologiesd| (2011 :c| Singapore)?| UNAUTHORIZED;

245 10 a| NEMS/MEMS technology and devicesh| [electronic resource] :b| selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore /c| edited by Lynn Khine and Julius M. Tsai.;

260 a| Durnten-Zurich ;a| Enfield, NH :b| Trans Tech,;

300 a| x, 229 p. :b| ill. ;c| 25 cm.;

490 1 a| Advanced materials research,x| 1022-6680 ;v| v. 254;

504 a| Includes bibliographical references and indexes.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Nanoelectromechanical systemsv| Congresses.=| ^A787653;

650 0 a| Microelectromechanical systemsv| Congresses.=| ^A728197;

653 1 a| NEMS/MEMS technology;

653 1 a| Materials;

653 1 a| Advanced technologies;

653 1 a| ICMAT;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Khine, Lynn.?| UNAUTHORIZED;

700 1 a| Tsai, Julius M.?| UNAUTHORIZED;

830 0 a| Advanced materials researchv| v. 254.x| 1022-6680=| ^A1117048;

856 40 z| Full text available from Ebook Central - Academic Completeu| https://ebookcentral.proquest.com/lib/eastcarolina/detail.action?docID=1872609;

947 a| (OCoLC)ocn751790683;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 5533233;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5533233-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 11/13/2020x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5533233-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 11/13/2020x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5533233-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 11/13/2020x| EBOOKz| JERESOURCE;

NEMS/MEMS technology and devices selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / edited by Lynn Khine and Julius M. Tsai.

Author/creator	International Conference on Materials for Advanced Technologies
Other author	Khine, Lynn.
Other author	Tsai, Julius M.
Format	Electronic
Publication Info	Durnten-Zurich ; Enfield, NH : Trans Tech,
Description	x, 229 p. : ill. ; 25 cm.
Supplemental Content	Full text available from Ebook Central - Academic Complete
Subjects	Nanoelectromechanical systems--Congresses. Microelectromechanical systems--Congresses.

Series	Advanced materials research, 1022-6680 ; v. 254 Advanced materials research v. 254. 1022-6680 ^A1117048
Bibliography note	Includes bibliographical references and indexes.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2011377926
ISBN	9783037851456 (pbk.)
ISBN	3037851457 (pbk.)

NEMS/MEMS technology and devices selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / edited by Lynn Khine and Julius M. Tsai.

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