Fundamental principles of optical lithography the science of microfabrication / Chris Mack.
| Author/creator | Mack, Chris A. |
| Format | Electronic |
| Publication Info | Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, |
| Description | xvii, 515 p. : ill. ; 25 cm. |
| Supplemental Content | Full text available from Ebook Central - Academic Complete |
| Subjects |
| Bibliography note | Includes bibliographical references and index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2007044548 |
| ISBN | 9780470018934 |
| ISBN | 0470018933 |
| ISBN | 9780470727300 (pbk.) |
| ISBN | 0470727306 (pbk.) |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |