Resonant MEMS Fundamentals, Implementation and Application
| Format | Electronic |
| Publication Info | Wiley-VCH [Imprint] Hoboken : John Wiley & Sons, Incorporated |
| Description | 512 p. ill 24.000 x 017.000 cm. |
| Supplemental Content | Full text available from Ebook Central - Academic Complete |
| Subjects |
| Other author/creator | Brand, Oliver Editor |
| Other author/creator | Josse, Fabien Editor |
| Other author/creator | Heinrich, Stephen D. Editor |
| Other author/creator | Korvink, Jan G. Contribution by |
| Other author/creator | Tabata, Osamu Contribution by |
| Other author/creator | Dufour, Isabelle Editor |
| Series | Advanced Micro and Nanosystems Ser. |
| Summary | Annotation Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| ISBN | 9783527335459 |
| ISBN | 3527335455 (Trade Cloth) Forthcoming |
| Standard identifier# | 9783527335459 |
| Stock number | 00028608 |