Gettering defects in semiconductors / V.A. Perevostchikov, V.D. Skoupov ; [translator, Victor Gloumov].

Author/creator Perevostchikov, V. A.
Other author Skupov, V. D. (Vladimir Dmitrievich)
Format Electronic
Publication InfoBerlin ; New York : Springer,
Descriptionxv, 386 p. : ill. ; 25 cm.
Supplemental ContentFull text available from eBooks on EBSCOhost
Subjects

Uniform titleGetterirovanie primeseĭ i defektov v poluprovodnikakh. English
SeriesSpringer series in advanced microelectronics, 1437-0387 ; 19
Bibliography noteIncludes bibliographical references (p. [343]-366) and indexes.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 2005927733
ISBN9783540262442
ISBN354026244X